Rudolph Technologies has secured multiple orders from two advanced packaging service suppliers for its Firefly inspection systems.
The system helps manufacturers in identifying defects earlier in the process, improving reliability of devices.
It uses conventional imaging techniques to reduce yield-robbing failures in both the front- and back-end of the semiconductor manufacturing process.
Rudolph has received orders for seven systems, which are due to be shipped this year.
The orders were placed by a foundry and an outsourced assembly and test (OSAT) facility to detect defects at fan-out and wafer-level chip scale packaging (WLCSP) applications.
Rudolph said one of the main reasons for placing the orders was the Clearfind Technology, which helps in detecting critical defects that can otherwise escape detection.
Detection of defects such as un-etched metal residues and low-contrast organic residues, at early stages of manufacturing has become important as Vias and redistribution line (RDL) features continue to shrink.
Rudolph’s Process Control Group general manager and vice president Mike Goodrich said: “Advanced packaging is rapidly becoming a critical differentiator for mobile and Internet of Things (IoT) device manufacturers with growth in multiple technology segments. This includes fan-out wafer level packaging, which Yole Développement estimates will have a compound annual growth rate as high as 50 percent over the next three years.
The Firefly System provides a combination of defect sensitivity and substrate flexibility, in a single platform, which helps our customers reduce their capital investment requirements.
“By including our automatic defect classification TrueADC software and yield management Discover software, these systems will deliver a complete solution for process control and quick yield learning at critical steps in advanced packaging processes.”
Rudolph CEO Mike Plisinski said: “Rudolph collaborates extensively with customers early in the development cycle in order to gain a deeper understanding of their specific challenges. In doing so, we are able to leverage Rudolph’s broad technology portfolio and experience to provide a more comprehensive solution to our customers.
“In recent years, Rudolph has made a conscious effort to cultivate strategic relationships across our customer base to transform our focus from supplying equipment to being a process control solution partner.”