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Physik Instrumente’s Low-Profile Vacuum Precision Stage

Confined spaces in vacuum chambers require drives and positioning solutions which are particularly compact. With a height of only 21mm, the M-683.2V4 translation stage from Physik Instrumente (PI) is one of the flattest micro-translation stages on the market, and is now also available for use in vacuum environments to 10-6 mbar. An encoder resolution of 0.1 µm over 50mm travel makes it ideal for tasks requiring a high degree of precision.

For better guiding accuracy the M-683 positioner uses two crossed-roller bearings, which are mounted on precision-ground aluminum profiles. They are designed for loads up to 5kg.

Its piezoceramic U-164 PILine® linear motors have high holding forces which are greater than the drive forces, even when powered down. They therefore generate no heat when at rest, nor is there any positional jitter with active closed-loop control, as may occur with conventional motors.

The unique PILine® piezomotor technology developed by PI requires neither spindle nor gear. The direct drive is integrated in the stage and gives it its high velocity of up to several hundred millimeters per second.

PI is well-known for its high quality and has been one of the leading players in the global market for precision positioning technology for many years. It has been developing and manufacturing standard and OEM products with piezo or motor drives for 40 years. In addition to its three German factories, PI has eight branch offices and over 500 employees worldwide.