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New Piezo Nanopositioning System: Versatile, Fast and Compact with Large Clear Aperture

The P-630 stages are perfectly suited, e.g. for use in sensor heads or precision motion of objects in optical and tactile metrology as well as for microstructuring.

With travel ranges up to 80µm and a direct piezo actuator drive, the compact positioning stages reach high scanning frequencies and settling times of only a few milliseconds. At a width of only 50mm, their clear aperture is relatively large with a diameter of 30mm.

The drive technology of the highly dynamic piezo nanopositioning systems is based on all-ceramic insulated PICMA® piezo actuators. They have a proven longer lifetime and higher reliability than conventional polymer-insulated actuators.

The P-630 stages achieve nanometer-precise positioning accuracy and stability is using an integrated capacitive position sensor.

Optimum control properties are ensured via the high-performance single-channel E-709.CHG motion controller. Its digital technology allows for refined linearization algorithms to improve accuracy; the operating parameters can easily be optimized via software.

P-630 nanopositioning system